Presentation Information
[8p-N324-13]Noise characteristics of piezoresistive readout in SOI MEMS beam resonators
〇Ryotaro Takeuchi1, Zhang Ya1, Liu Qian1, Hirakawa Kazuhiko1, Morohashi Isao2 (1.Tokyo Univ. of Agri., 2.NICT)
Keywords:
MEMS,piezoresistive effect,THz