Presentation Information

[8p-N324-2]Effect of RTA on Upside-Down InSb Films Deposited by RF Sputtering

〇Shuhei Shimizu1, Tatsushi Higa1, Takashi Noguchi1, Takashi Kajiwara2, Taizoh Sadoh2, Tatsuya Okada1 (1.Univ. Ryukyus, 2.Kyushu Univ.)

Keywords:

InSb,RTA