Presentation Information
[8p-N324-3]Crystallization of InSb Films on Polyimide using RTA
〇Tatsushi Higa1, Shuhei Shimizu1, Takashi Noguchi1, Takashi kajiwara2, Taizoh Sadoh2, Tatsuya Okada1 (1.Univ. Ryukyus, 2.Kyushu Univ.)
Keywords:
InSb(indium antimonide),Poly Imide,Crystallization