[8p-N324-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[8p-N324-7] Characterization of Young’s Modulus Anisotropy in Single-Crystal Diamond

〇Zhaozong Zhang¹, Wen Zhao¹, Guo Chen¹, Satoshi Koizumi¹, Meiyong Liao¹ (1.NIMS)

Keywords:

diamond,MEMS,Young s modulus