[8p-N401-1~12] 15.5 Group IV crystals and alloys

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[8p-N401-11] Evaluation of strain distribution around cracks formed on strained SiGe/Ge

〇Ryota Mizoguchi¹, Keitaro Kato¹, Shibahara Yuka¹, Aikawa Mayu¹, Michihiro Yamada¹, Kohei Hamaya^2,3,4, Kentarou Sawano¹ (1.Tokyo City Univ., 2.Grad. Sch. Eng. Sci., The Univ. of Osaka., 3.CSRN, The Univ. of Osaka., 4.OTRI, The Univ. of Osaka.)

Keywords:

SiGe,crack