Presentation Information

[8p-N401-2]Sputtering heteroepitaxy of Ge1−xSnx layers with high Sn content on Si(001) substrates

〇Kousaku Goto1, Shigehisa Shibayama1, Mitsuo Sakashita1, Masashi Kurosawa1, Osamu Nakatsuka1,2 (1.Grad. Sch. Eng., Nagoya Univ., 2.IMaSS Nagoya Univ.)

Keywords:

semiconductor