Presentation Information
[8p-N401-3]Epitaxial Growth of GeSn Thin Films on Si via Nanochannel Sputtering through Ultra-Thin Oxide
〇Kensho Ishimaru1, Masahiro Hara1, Takuma Kobayahsi1, Takayoshi Shimura1,2, Heiji Watanabe1 (1.UOsaka, 2.Waseda Univ.)
Keywords:
Single crystal GeSn film,Sputter epitaxy,Photoluminescence