[8p-P10-1~49] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[8p-P10-10] Sputtering deposition of SnO thin films on Si substrate: Dependence on Si crystal orientation

〇(M1C)Yoshikazu Shin¹, Aikawa Shinya¹ (1.Kougakuin Univ.)

Keywords:

SnO,p type oxide semiconductor,layered structure