Presentation Information

[8p-P10-11]Annealing treatment of a stacked film for the fabrication of p-type amorphous TaSnOx

〇(M1C)Yoshikazu Shin1, Takahashi Tsukasa1, Aikawa Shinya1 (1.Kougakuin Univ.)

Keywords:

SnO,p type oxide semiconductor,amorphous TaSnOx