[8p-P10-1~49] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[8p-P10-21] Structural changes of ZnO films on amorphous quartz glass by anneal at high temperatures

〇Keigou Maejima¹, Issa Kominato¹ (1.Kagoshima Univ.)

Keywords:

zinc oxide,amorphous quartz glass

During fabrication of zinc oxide film at high temperature, the reactions between zinc oxide and substrate may cause the degradation of zinc oxide. In this study, we focus on amorphous quartz glass substrate and structural changes of zinc oxide by anneal at high temperature are characterized.