[8p-P10-1~49] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[8p-P10-28] Characterization of SnSO₄ thin films (<10 nm) by an etch-back process

〇(M2)Kento Moriya¹, Sokichi Naganawa¹, Yukihiro Kudoh¹, Taiju Takahashi¹, Tomohiro Yamaguchi¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:

p-type transparent semiconductor,sulfate