[8p-P10-1~49] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[8p-P10-37] Fabrication of low-resistivity ZnO:Al films on glass substrates using Solid-Phase-Crystallized ZnON seed layers: Effects of crystallization degree of as-deposited seed layers

〇Yoshiharu Wada¹, Wenrui Xie¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Keywords:

TCO,ZnO,Sputtering