Presentation Information
[8p-P10-39]Vacuum Annealing Time Dependence of the Properties of Zn + N co-doped ZnO Films
〇Haruki Ohmori1, Abrarul Haque1, Yumika Yamada1,2, Shuhei Funaki1, Yasuji Yamada1 (1.Shimane Univ., 2.Kobelco Res. Inst. Inc.)
Keywords:
ZnO,annealing,p-type
ZnO is attracting attention as an alternative material to ITO used in pn junction devices. However, even when acceptors are added to ZnO, donor defects are generated, making it difficult to produce p-type ZnO. On the other hand, a simultaneous doping method, which involves co-adding acceptors and donors, has been proposed as a method for producing p-type ZnO. In this study, we investigated how the properties of Zn+N co-doped ZnO films produced by the simultaneous doping method change after vacuum annealing treatment.