Presentation Information

[8p-P10-42]Effect of Oxidation Annealing on Amorphous p-type TeOX Thin-Film Transistors

〇Kazuho Ishi1, Yoshikazu Shin1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:

amorphous p-type oxide semiconductor,thin film transistor,anneal