[8p-S202-1~8] Lab to Fab: Accelerating R&D to Mass Production via Semiconductor DX

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[8p-S202-2] Computer Simulation of CMP processes

〇Toshihiro Shimada¹, Seiya Yokokura¹, Hiroki Waizumi¹ (1.Hokkaido Univ.)

Keywords:

CMP,simulations,molecular dynamics simulations

We discuss computer simulations of the CMP process based on actual examples. In addition to the effects of abrasive impact and pressure, chemical processes are also involved, so it is necessary to combine molecular dynamics calculations with elasticity and fluid calculations. Furthermore, since the force fields used in molecular dynamics calculations are empirical, it is also necessary to compare them with first-principles calculations. We have identified the effects of water molecules and are investigating the addition of hydrogen peroxide and other substances.