Presentation Information
[8p-S202-8]Strategy for 300 mm-scale production of 2D/2.5D materials assisted with AI
〇Hiroki Ago1,2, Pablo Solis-Fernandez1 (1.IGESE, Kyushu Univ., 2.CSeDE, Kyushu Univ.)
Keywords:
2.5D materials,2D materials,chemical vapor deposition