Presentation Information

[8p-S202-8]Strategy for 300 mm-scale production of 2D/2.5D materials assisted with AI

〇Hiroki Ago1,2, Pablo Solis-Fernandez1 (1.IGESE, Kyushu Univ., 2.CSeDE, Kyushu Univ.)

Keywords:

2.5D materials,2D materials,chemical vapor deposition