[9a-N107-1~11] 6.4 Thin films and New materials

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[9a-N107-1] Study of the substrate dependence of the structural differences in Cr-Al thin films and their application to the force sensors

〇Natsumi Aoki¹, Masaya Tsuno¹, Myo Than Htay Yamamoto², Yoshio Hashimoto² (1.KOA Co., Ltd., 2.Shinshu Univ.)

Keywords:

Force sensor,Thin film resister,Thin film structure

We have fabricated a force sensor with a wide measurement range, consisting of ceramic substrates and a Cr-based thin film with a high gauge factor. The electrical and sensing properties were found to vary depending on the substrate type and the thickness of the sensor film. These dependencies were attributed to variations in the crystal structure and mechanical properties of the thin films.