Presentation Information
[9a-N301-1]Study on exfoliation of epitaxial nitride thin films on graphene/SiC substrates
〇(M2)Mana Tomizawa1, Minjae Jun1, Kohei Ueno1, Ting Pan2, Hodaka Hamamoto2, Keisuke Takemoto2, Kenta Emori2, Hiroshi Fujioka1 (1.Univ. of Tokyo, 2.Nissan Motor Co., Ltd.)
Keywords:
Sputtering,2D materials,Nitride thin films