[9a-N302-1~11] 15.7 Crystal characterization, impurities and crystal defects

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[9a-N302-1] Effect of crystal diameter fluctuation on dislocation behavior in <110>-oriented CZ-Si crystals

〇Hisashi Matsumura^1,2, Hiroyuki Saito¹, Toshinori Taishi² (1.GlobalWafers Japan Co., Ltd., 2.Shinshu Univ.)

Keywords:

Silicon,Dislocation