[9a-N307-1~11] CS.10 Code-sharing session of 6.6 &12.2

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[9a-N307-11] Sub-nanoscale structural analysis of corrosion protection film for copper fine wires on semiconducting devices by in-liquid AFM

〇Daiki Oka¹, Hayashi Kaito¹, Miyata Kazuki¹, Uno Megumi², Takatoh Chikako², Fukuma Takeshi¹ (1.Kanazawa Univ., 2.EBARA Corp.)

Keywords:

Semiconductor,CMP,3D-SFM