[9a-N324-5~5] 8.8 Plasma Electronics Division Award Speech

10:15 AM - 10:45 AM JST(1:15 AM - 1:45 AM UTC)

[9a-N324-5] [The 23rd Plasama Electronics Award Speech] Ion-neutral Reactive Collision Model for Processing Plasmas

〇Kazuki Denpoh¹, Taiki Kato¹, Masaaki Matsukuma¹ (1.Tokyo Electron Technology Solutions)

Keywords:

plasma,theory,ion-neutral collision cross section

Particle-based plasma models (e.g., PIC-MCC), which can precisely capture phenomena in plasmas, play more important roles for R&D of semiconductor device manufacturing equipment and processes. In their practical use, however, collision cross sections (CSs) are insufficient, especially for ion-neutral collisions. In the award paper, we proposed a theory called DNT+DM to produce comprehensive ion CS data sets for all types (atomic/polar/non-polar) of molecules. DNT+DM is a breakthrough to solve the issue above, and its applications have already begun. In addition, it can be used for interpretation of measured ion CSs and preliminary studies prior to experiments.