The 86th JSAP Autumn Meeting 2025
Advanced Search

Session Details

Oral presentation8 Plasma Electronics : 8.8 Plasma Electronics Division Award Speech

[9a-N324-5~5]8.8 Plasma Electronics Division Award Speech

Tue. Sep 9, 2025 10:15 AM - 10:45 AM JST
Tue. Sep 9, 2025 1:15 AM - 1:45 AM UTC
N324 (Lecture Hall North)
10:15 AM - 10:45 AM JST(1:15 AM - 1:45 AM UTC)

[9a-N324-5][The 23rd Plasama Electronics Award Speech] Ion-neutral Reactive Collision Model for Processing Plasmas

〇Kazuki Denpoh1, Taiki Kato1, Masaaki Matsukuma1 (1.Tokyo Electron Technology Solutions)
Back to Category List