Presentation Information

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9a-N401-8]Synthesis of N-doped DLC using Photo-emission Assisted Plasma CVD

〇(M1C)Yulin Yan¹, Satoshi Seki¹, Shuichi Ogawa¹ (1.Nihon Univ.)

Keywords:

Diamond-Like Carbon,photoemission-Assisted Plasma CVD,Raman spectroscopy

We investigated the deposition conditions of nitrogen-doped DLC (N-DLC) films, which are attracting attention as gate insulator films for graphene FETs, using photoelectron controlled plasma CVD by employing glow discharge and Townsend discharge while varying the N₂flow rate. The results revealed differences in deposition efficiency and DLC formation depending on the discharge mode. Notably, in Townsend discharge, the CH₄ dissociation efficiency decreased due to the influence of N₂, which suggested that film deposition becomes difficult.

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