[9a-N406-1~7] 1.3 Novel technologies and interdisciplinary engineering

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[9a-N406-3] Fabrication of Bent Waveguides and Micro-Mirrors by Planar Semiconductor Process

〇(M2)Keito Kikuchi¹, Taro Itatani², Yoshinobu Okano¹, Akihiro Noriki², Takeru Amano² (1.Tokyo City Univ., 2.AIST.)

Keywords:

3D optical interconnection,optical waveguide,micromirror

With the advancement of AI technology, data centers are increasingly adopting optical wiring and optical integration to achieve lower power consumption and higher speed. Optoelectronic co-packaging systems integrate electronic and optical devices at the package level, and active research is being conducted on optical connections between optical waveguides and optical fibers. In this study, we propose an optical interconnection structure using curved optical waveguides and concave mirrors, and report on the trial integration of concave mirrors fabricated by a silicon planar process with SiN waveguides featuring a curved structure.