Presentation Information

[9a-P06-2]Evaluation of Fabrication Tolerances on Sub-Terahertz-Band Silicon BIC Cavities

〇Yusuke Kondo1, Kazunori Shibata2, Shuichi Murakami1 (1.ORIST, 2.Osaka Univ.)

Keywords:

Deep Reactive Ion Etching,double-photonic crystal slab cavity,Micro Electro Mechanical Systems