The 86th JSAP Autumn Meeting 2025
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Poster presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-P06-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 9, 2025 9:30 AM - 11:30 AM JST
Tue. Sep 9, 2025 12:30 AM - 2:30 AM UTC
P06 (Gymnasium)

[9a-P06-1]Etch pit suppression by using Ar gas addition in Quartz Deep RIE

〇Kazuki Yoshida1, Naoya Yamada1, Toru Yahagi1, Mutsuto Katoh1 (1.Yamagata Research Inst. Tech.)

[9a-P06-2]Evaluation of Fabrication Tolerances on Sub-Terahertz-Band Silicon BIC Cavities

〇Yusuke Kondo1, Kazunori Shibata2, Shuichi Murakami1 (1.ORIST, 2.Osaka Univ.)

[9a-P06-3]Etching characteristics of single crystal Si with 1% KOH solution containing carbon-based materials

〇Kengo Kimura1, Hiroshi Tanaka1 (1.Aichi Institute of Technology)
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