[9p-N101-1~10] [Open Symposium] Cutting-edge logic semiconductors and associated technologies

2:35 PM - 3:05 PM JST(5:35 AM - 6:05 AM UTC)

[9p-N101-4] Emerging Trends in Post-Cu BEOL and Future Perspectives on Backside Interconnect

〇Fumihiro Inoue¹ (1.Yokohama Nat. Univ.)

Keywords:

BEOL,BSPDN