Presentation Information
[9p-N105-12]Crystal Growth Dynamics of κ-Ga2O3 Thin Film on ε-GaFeO3 Substrate with Mist-CVD
〇(M2)Misuzu Sugimoto1, Taisei Kano1, Osamu Ueda2, Hiroyuki Nishinaka1 (1.Kyoto Inst. Tech., 2.Meiji Univ.)
Keywords:
Gallium Oxide,Mist-CVD