Presentation Information

[9p-N105-12]Crystal Growth Dynamics of κ-Ga2O3 Thin Film on ε-GaFeO3 Substrate with Mist-CVD

〇(M2)Misuzu Sugimoto1, Taisei Kano1, Osamu Ueda2, Hiroyuki Nishinaka1 (1.Kyoto Inst. Tech., 2.Meiji Univ.)

Keywords:

Gallium Oxide,Mist-CVD