[9p-N105-1~21] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-N105-15] High temperature growth of rs-MgO thin films on sapphire substrates.

〇Kosuke Kimura¹, Shigeharu Kawabata¹, Kohei Shima², Kouichi Matsuo³, Kouji Uchida³, Atsushi Oono³, Isao Takahashi⁴, Tsutomu Araki¹, Shigefusa Chichibu², Kentaro Kaneko^4,5 (1.Col. of Sci. & Eng. Ritsumeikan Univ., 2.IMRAM-Tohoku Univ., 3.IWASAKI ELECTRIC Co., Ltd., 4.ROST, 5.RISA)

Keywords:

rs-MgO,mist-CVD method,High temperature growth