Presentation Information

[9p-N206-15]Sputtering growth of PdCoO2 thin films for advanced interconnects

〇Takayuki Harada1, Takuro Nagai1, Yasushi Masahiro2, Yasunori Kama2 (1.NIMS, 2.Tanaka Precious Metal Technologies)

Keywords:

Interconnect,Low resistivity material,Thin film