[9p-N301-1~19] 15.4 III-V-group nitride crystals

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[9p-N301-2] Tilt-scan DPC-STEM Analysis of Polarity-Inverted AlN Crystals

〇Shigetaka Tomiya¹, Zentaro Akase¹, Kazunori Iwamitsu¹, Akira Yasuhara², Tomohiro Tamano³, Ryota Akaike³, Hideo Miyake³ (1.NAIST, 2.JEOL, 3.Mie Univ.)

Keywords:

Differential Phase Contrast,Polarity inverted aluminum nitride crystal

DPC-STEM enables visualization of electric field distributions; however, in crystalline specimens, diffraction contrast often hinders accurate analysis. In this study, by applying the Tilt-scan DPC method, the electric field distribution near the polarity inversion interface in AlN was obtained with high contrast and clarity.