[9p-N301-1~19] 15.4 III-V-group nitride crystals

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[9p-N301-5] Evaluation of dislocation structure in AlGaN grown on sputter-annealed AlN

〇Hiroki Yasunaga^1,2, Ryota Akaike^2,3, Kensei Oya³, Shinnosuke Mori³, Takao Nakamura^2,3, Hideto Miyake^2,3 (1.Mie Univ. ORIP, 2.Mie Univ. IC-SDF, 3.Mie Univ. Grad. Sch. of Eng.)

Keywords:

AlN,Sputtering,TEM