[9p-N321-1~17] 15.4 III-V-group nitride crystals

6:00 PM - 6:15 PM JST(9:00 AM - 9:15 AM UTC)

[9p-N321-17] Epitaxial Growth of NbAlN films by Sputtering

〇Riku Kikuchi¹, Souta Kurogi², Takahiro Kawamura³, Kazuhisa Ikeda^1,2, Atsushi Kobayashi^1,2 (1.Grad.school of Tokyo Univ. of Science, 2.Tokyo Univ. of Science, 3.Mie Univ.)

Keywords:

NbAlN,AlN,sapphire