[9p-N321-1~17] 15.4 III-V-group nitride crystals

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-N321-6] Improvement of mosaic spread of sputtered GaN thin film

〇(M1)Riki Kanetake¹, Akinori Saito¹, Naoomi Yamada¹ (1.Chubu Univ.)

Keywords:

GaN,Sputtering,Mosaic Spread