Presentation Information

[9p-N322-10]PbC type-2 center (carbon dangling-bond center) at 4H-SiC(0001)/SiO2 interface

〇(M2)Bunta Shimabukuro1, Yusuke Nishiya2, Sosuke Horiuchi1, Mitsuru Sometani3, Hirohisa Hirai3, Heiji Watanabe4, Yu-ichiro Matsushita2, Takahide Umeda1 (1.Tsukuba Univ., 2.Quemix Inc., 3.AIST, 4.Osaka Univ.)

Keywords:

4H-SiC(0001),MOS-interface,Carbon dangling-bond defects

"PbC center" was reported as Carbon dangling-bond center at 4H-SiC(0001)/SiO2 interface. The energy levels of "PbC center" are EV + 0.6 eV for (+/0) and EV + 1.2 eV for (0/-). On the other hand, we observed another carbon dangling-bond defect at 4H-SiC(0001)/SiO2 interface and its energy level (EV + 2.2 eV) by using Electrically Detected Magnetic Reasonance (EDMR) spectroscopy. The combination of EDMR spectroscopy and first principle calculation indicates this defect should be different type of PbC center, namely "PbC type2 center" .