[9p-N322-1~20] 13.7 Compound and power devices, process technology and characterization

6:30 PM - 6:45 PM JST(9:30 AM - 9:45 AM UTC)

[9p-N322-19] Influence of the factor added by Firsov on the energy loss of ions associated with electronic excitation

〇Kazuhiro Mochizuki¹, Tomoaki Nishimura¹, Tomoyoshi Mishima¹, Fumimasa Horikiri¹ (1.Hosei Univ.)

Keywords:

channeling,ion implantation,electronic stopping cross section