[9p-N323-1~11] 13.9 Compound solar cells

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[9p-N323-9] Fabrication of wurtzite-type ZnO_1-xS_x thin films via reactive sputtering with sulfur plasma

〇(D)Daiki Daiki Motai¹, Issei Suzuki¹, Taichi Nogami¹, Hitoshi Tampo², Takehiko Nagai², Norio Terada², Masami Aono³, Takahisa Omata¹ (1.Tohoku Univ., 2.AIST, 3.Kagoshima Univ.)

Keywords:

Reactive sputtering,Sulfur plasma,Solid solution