[9p-N324-1~19] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[9p-N324-10] Control of MoS_X Anode Films by Sputtering and Their Application to Li-ion Batteries

〇Koki Sakaguchi¹, Yoshiyuki Hasegawa¹, Tatuo Ueda¹, Keigo Terada¹, Daiki Fujikake¹, Ryota Murase¹, Ryosuke Yamazaki¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)

Keywords:

sputtering,Li ion Battery