Presentation Information
[9p-N324-13]Formation process of antireflection coatings for transparent substrates using armospheric-pressure VHF plasma
〇Naoto Mizusawa1, Uon Leapheng1, Yuki Ono1, Hiromasa Ohmi1, Hiroaki Kakiuchi1 (1.Univ. Osaka)
Keywords:
plasma