Presentation Information

[9p-N324-13]Formation process of antireflection coatings for transparent substrates using armospheric-pressure VHF plasma

〇Naoto Mizusawa1, Uon Leapheng1, Yuki Ono1, Hiromasa Ohmi1, Hiroaki Kakiuchi1 (1.Univ. Osaka)

Keywords:

plasma