Presentation Information
[9p-N324-7]Application of multi-short HiPIMS to DLC film deposition and
its optical emission spectroscopy
〇Kaito Ishikawa1, Kenta Ozeki1, Takashi Kimura1 (1.Nagoya Inst. Tech.)
Keywords:
multi-short HiPIMS,DLC film deposition,optical emission spectroscopy