Presentation Information

[9p-N324-8]Preparation of Vanadium Oxide Film by HiPIMS with Superimposed Low-Power Pulsed Sputtering and Optical Emission Spectroscopy

〇Jumpei Kinugawa1, Shunsuke Ando1, Takeru Korenaga1, Takashi Kimura1 (1.Nagoya Inst. Tech.)

Keywords:

Vanadium Oxide,HiPIMS,Optical Emission Spectroscopy