Presentation Information
[9p-P07-1]Examination of transfer process of Ge layers on Si(001) onto c-Al2O3 substrates
〇Mahiro Tanaka1, Yuji Yamamoto2, Shigehisa Shibayama1, Mitsuo Sakashita1, Masashi Kurosawa1, Osamu Nakatsuka1,3, Wei-Chen Wen2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IHP-Leibniz Institute for High Performance Microelectronics, 3.IMaSS, Nagoya Univ.)
Keywords:
semiconductor