[9p-P09-1~17] 8.1 Plasma production and diagnostics

[9p-P09-15] Measurement of spatial distribution of B atoms in inductively coupled BF₃ plasma

〇Hayato Sato¹, Kai Takemura¹, Keigo Takeda¹ (1.Meijo Univ.)

Keywords:

emission spectroscopy

We report the results of our analysis of the spatial distribution of boron (B) atoms in inductively coupled BF3 plasmas, using both emission spectroscopy measurements and simulations as a stepping stone toward further elucidation of the reaction processes of particles in plasmas used for plasma doping.