Presentation Information
[9p-P09-16]Measurement of Boron Atom Density in Inductively Coupled BF3-Ar Plasma with Absorption Spectroscopy
〇(M1C)Kai Takemura1, Hayato Sato1, Keigo Takeda1 (1.Meijo Univ.)
Keywords:
plasma diagnostics,plasma doping,semiconductor
This research aims to gain insight into the internal state of plasma by measuring the B atom density in an inductively coupled BF3-Ar plasma using absorption spectroscopy with a hollow cathode lamp (HCL) as the light source.
The presentation will show the various parameter dependencies of the B atom density obtained in the experiment and a comparison with plasma simulation.
The presentation will show the various parameter dependencies of the B atom density obtained in the experiment and a comparison with plasma simulation.