Presentation Information
[9p-P09-5]Investigation of magnet arrangement and magnetic field distribution for unbalanced RF magnetron plasma production
〇(M1)Tomoya Mihara1, Yasunori Ohtsu1 (1.Saga Univ.)
Keywords:
Plasma Generation,Unbalanced Magnetron,Electron Temperature Control
Precise control of electron temperature is crucial for optimizing plasma processes. In this study, we aim to generate high-density plasma using an unbalanced magnetron structure and control the electron temperature via a grid bias method. As a preliminary investigation, we performed magnetic field simulations for different magnet arrangements on a circular target, consisting of a central magnet and peripheral magnets. By comparing discrete magnets and a ring-shaped magnet configuration, differences in magnetic field distributions were evaluated. These results provide a basis for the optimal design of magnet configurations in unbalanced magnetron systems.