Presentation Information
[9p-P09-7]Influence of gas pressure on a high-density RF hydrogen plasma production using a hybrid hollow electrode and magnets
〇Kengo Tazume1, Yasunori Ohtsu1 (1.Saga Univ.)
Keywords:
RF plasma,Functional Thin Film,hydrogen plasma
This study aims to develop a high-frequency, magnetically enhanced hollow cathode discharge system for the generation of high-density hydrogen plasma. Specifically, it investigates and clarifies the influence of hydrogen gas pressure on plasma characteristics under varying outer magnet diameters positioned around the hollow cathode, thereby elucidating the role of magnetic confinement geometry in optimizing plasma density.