[14a-P02-1~6] 7 Beam Technology and Nanofabrication (Poster)

[14a-P02-2] Development of XAFS/XAFS imaging method for dilute sample in actual devices

〇Tomoya Uruga¹, Takuma Kaneko¹ (1.JASRI)

Keywords:

XAFS,XAFS imaging,actual devices

X-ray absorption fine structure (XAFS) spectroscopy is a powerful method to obtain chemical state and local structure information of the target element in crystalline and non-crystalline samples. In this study, we developed a XAFS measurement method and XAFS imaging method for dilute sample in actual devices with high X-ray absorption, which has been difficult to measure so far, and conduced test measurement. We will present the outline of the measurement method and test measurement results.