[14p-K101-1~7] Core technologies of the semiconductor industry supporting the progress in IoT society. -Fusion & Diversification-

4:00 PM - 4:30 PM JST(7:00 AM - 7:30 AM UTC)

[14p-K101-6] Development of a compact module for high-precision inertial sensors and their applications

〇Fumito Miyazaki¹ (1.Toshiba R&D Center)

Keywords:

MEMS,inertial sensor