[14p-K309-1~14] 3.4 Laser system and materials

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[14p-K309-6] Investigation of time-dependent changes in DUV transmittance of CsLiB₆O₁₀crystals

〇(B)Kotaro Morita¹, Ryunosuke Oura¹, Tomoaki Nambu¹, Ryota Murai², Hironori Igarashi³, Makoto Nakajima¹, Yusuke Mori^2,4, Masashi Yoshimura^1,2 (1.ILE, Osaka Univ., 2.SOSHO CHOKO Inc., 3.Gigaphoton Inc., 4.Grad. Sch. of Osaka Univ.)

Keywords:

nonlinear optical crystals,deep ultraviolet

The enhancement of output power in deep ultraviolet (DUV) light sources utilizing crystals faces challenges such as DUV light absorption by the CsLiB₆O₁₀ crystal and output degradation. It is believed that an increase in crystal defects leads to a decrease in transmittance. The presence of water impurities in the device is considered one of the factors contributing to crystal defects. In this study, we conducted a detailed investigation into the time-dependent behavior of transmittance before and after the desorption of water impurities inside the device.