[14p-K403-1~13] 6.2 Carbon-based thin films

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[14p-K403-11] Ion implantation of ⁷Be into a diamond thin film

〇Yasuto Miyake¹, Hiroki Okuno¹, Hideyuki Watanabe^1,2 (1.RIKEN RNC, 2.AIST)

Keywords:

diamond,ion implantation,nuclear transmutation

In this study, we propose a novel method for fabricating Li-doped diamond using nuclear transmutation of ⁷Be into ⁷Li. As a preliminary investigation, we performed a “cold test” using ⁹Be, a stable isotope of Be. Ion implantation of Be into diamond substrates has been conducted and thermal diffusion of Be by RTA (rapid thermal annealing) treatment has been investigated thus far. Based on the experimental conditions established by the cold test, ion implantation of ⁷Be into a diamond thin film was conducted. This presentation will outline the experimental methods and discuss the results obtained from the ⁷Be experiments.